Open AccessEstablishment of the feasibility of a process capable of low cost, high volume production of silane, SiH/sub 4/. Low cost silicon solar array project, Task I. Quarterly progress report, July 1976--October 1976
Author(s) -
W. C. Breneman,
J. Y.P. Mui
Publication year - 1976
Language(s) - English
Resource type - Reports
DOI - 10.2172/7322513
Subject(s) - trichlorosilane , silane , dichlorosilane , silanes , silicon , adsorption , chemistry , activated carbon , materials science , chemical engineering , waste management , organic chemistry , engineering