Open AccessVariable-temperature sample system for ion implantation at -192 to +500/sup 0/C
Author(s) -
Charles T. Fuller
Publication year - 1978
Language(s) - English
Resource type - Reports
DOI - 10.2172/7277521
Subject(s) - sample (material) , ion , electromagnetic shielding , materials science , analytical chemistry (journal) , coupling (piping) , ion implantation , variable (mathematics) , current (fluid) , ion current , atomic physics , chemistry , electrical engineering , physics , engineering , metallurgy , mathematical analysis , mathematics , organic chemistry , chromatography , composite material