Open AccessChemical vapor deposition growth. Quarterly report No. 2
Author(s) -
R. P. Ruth,
H. M. Manasevit,
J. L. Kenty,
Lisa Ann Mondy,
W. I. Simpson,
Ji-Hun Yang
Publication year - 1976
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/7264515
Subject(s) - chemical vapor deposition , substrate (aquarium) , silicon , production (economics) , materials science , process engineering , environmental science , deposition (geology) , nanotechnology , production cost , engineering physics , optoelectronics , engineering , mechanical engineering , geology , paleontology , sediment , economics , macroeconomics , oceanography
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