Open AccessPhotoresist application by roller coating
Author(s) -
L.E. Schantz
Publication year - 1976
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/7148243
Subject(s) - photoresist , photolithography , thread (computing) , materials science , coating , resist , substrate (aquarium) , optoelectronics , composite material , engineering drawing , mechanical engineering , engineering , layer (electronics) , oceanography , geology
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