Open AccessEstablishment of the feasibility of a process capable of low cost, high volume production of silane, SiH/sub 4/. Low cost silicon solar array project, Task I. Quarterly progress report, October 1, 1976--December 31, 1976
Author(s) -
W.C. Breneman,
J. Y. P. Mui
Publication year - 1977
Language(s) - English
Resource type - Reports
DOI - 10.2172/7108770
Subject(s) - silane , trichlorosilane , silicon tetrachloride , dichlorosilane , catalysis , materials science , silicon , chemistry , waste management , chemical engineering , process engineering , engineering , organic chemistry , metallurgy