Open AccessTechnique for sputtering conductive In/sub 2/O/sub 3/--SnO/sub 2/ transparent films
Author(s) -
J.B. Snelling
Publication year - 1977
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/7094960
Subject(s) - sputtering , annealing (glass) , materials science , optoelectronics , omega , electrical conductor , sheet resistance , thin film , analytical chemistry (journal) , nanotechnology , composite material , chemistry , layer (electronics) , physics , quantum mechanics , chromatography
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