Nucleation, propagation, electronic levels and elimination of misfit dislocations in III-V semiconductor interfaces. Final report

This report discusses the following topics: strained layer defects; the structural and electronic characteristics of misfit dislocations; requirements for the growth of high quality, low defect density InGaAs strained epitaxial layers; the isolation and nucleation of misfit dislocations in strained epitaxial layers grown on patterned, ion-damaged GaAs; the effect of pattern substrate trench depth on misfit dislocation density; the thermal stability of lattice mismatched InGaAs grown on patterned GaAs; misfit dislocations in ZnSe strained epitaxial layers grown on patterned GaAs; and the measurement of deep level states caused by misfit dislocations in InGaAs/GaAs grown on patterned GaAs substrates