Open AccessPhase 2 of the automated array assembly task of the low cost silicon solar array project. Technical quarterly report No. 1, September 27--December 31, 1977. Motorola report No. 2345/1
Author(s) -
M. G. Coleman,
B. Pryor
Publication year - 1977
Language(s) - English
Resource type - Reports
DOI - 10.2172/6866713
Subject(s) - materials science , silicon , silicon nitride , etching (microfabrication) , optoelectronics , crystalline silicon , plasma etching , nanotechnology , layer (electronics)