Open AccessProcess feasibility study in support of silicon material. Task I. Quarterly technical progress report (I)
Author(s) -
C.S. Fang,
K.C. Hansen,
J.W. Jr. Miller,
Carl L. Yaws
Publication year - 1978
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/6814733
Subject(s) - process (computing) , silicon tetrachloride , process engineering , raw material , silicon , production (economics) , process design , work in process , silane , computer science , environmental science , manufacturing engineering , engineering , materials science , process integration , chemical engineering , chemistry , operations management , metallurgy , organic chemistry , economics , macroeconomics , operating system
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