Open AccessPhase 2 of the automated array assembly task of the low-cost silicon solar array project. Final report, 1 April 1979-31 March 1980
Author(s) -
M. G. Coleman,
R. A. Pryor,
T. Sparks,
R.M. Legge,
D. L. Saltzman
Publication year - 1980
Language(s) - English
Resource type - Reports
DOI - 10.2172/6774359
Subject(s) - materials science , silicon , etching (microfabrication) , substrate (aquarium) , layer (electronics) , silicon nitride , optoelectronics , ion implantation , doping , ion beam , nanotechnology , beam (structure) , ion , optics , chemistry , oceanography , physics , organic chemistry , geology