Open AccessInvestigation of proposed process sequence for the array automated assembly task. Phase I and II. Final report, October 1, 1977-June 30, 1980
Author(s) -
N. Mardesich,
Álvaro Enrique García Barbero,
K. Eskenas
Publication year - 1980
Language(s) - English
Resource type - Reports
DOI - 10.2172/6765885
Subject(s) - fabrication , materials science , wafer , coating , process (computing) , diffusion , sequence (biology) , nanotechnology , computer science , chemistry , medicine , alternative medicine , physics , pathology , thermodynamics , operating system , biochemistry
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