Open AccessReview of the silicon material task
Author(s) -
R. Lutwack
Publication year - 1984
Language(s) - English
Resource type - Reports
DOI - 10.2172/6712046
Subject(s) - silicon carbide , process engineering , silane , process (computing) , engineering , task (project management) , manufacturing engineering , modular design , computer science , materials science , systems engineering , metallurgy , operating system , chemical engineering