Open AccessProcess feasibility study in support of silicon material, Task I. Quarterly technical progress report (XI)
Author(s) -
C.S. Fang,
K.C. Hansen,
Jerry Miller,
Carl L. Yaws
Publication year - 1978
Language(s) - English
Resource type - Reports
DOI - 10.2172/6678641
Subject(s) - trichlorosilane , dichlorosilane , silane , silicon , vaporization , silicon carbide , silicon tetrachloride , coolant , chemistry , materials science , process engineering , mechanical engineering , organic chemistry , engineering