Open AccessProcess feasibility study in support of silicon material Task I. Final report, October 1, 1975-February 6, 1981
Author(s) -
Carl L. Yaws,
K.Y. Li,
J.R. Hopper,
C.S. Fang,
K.C. Hansen
Publication year - 1981
Language(s) - English
Resource type - Reports
DOI - 10.2172/6668149
Subject(s) - dichlorosilane , silicon , process engineering , process design , chemical reaction engineering , materials science , process integration , mechanical engineering , engineering , chemistry , metallurgy , biochemistry , catalysis