Open AccessImproved assembly processes for the Quartz Digital Accelerometer cantilever
Author(s) -
Adrien Romero,
C.T. Gebert
Publication year - 1990
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/6632695
Subject(s) - cantilever , accelerometer , eutectic system , materials science , wafer , polyimide , quartz , nanotechnology , computer science , composite material , layer (electronics) , alloy , operating system
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