Open AccessIdentification of nitriding mechanisms in high purity reaction bonded silicon nitride
Author(s) -
J. S. Haggerty
Publication year - 1993
Language(s) - English
Resource type - Reports
DOI - 10.2172/6632571
Subject(s) - nitriding , nitride , silicon nitride , materials science , amorphous solid , silicon , analytical chemistry (journal) , crystallography , chemical engineering , nanotechnology , chemistry , metallurgy , layer (electronics) , organic chemistry , engineering