Open AccessObservations of changes in residual gas and surface composition with discharge cleaning in PLT
Author(s) -
H.F. Dylla,
K. Bol,
S. Cohen,
R.J. Hawryluk,
E. Meservey,
S. M. Rossnagel
Publication year - 1978
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/6624035
Subject(s) - torr , analytical chemistry (journal) , residual gas analyzer , hydrogen , chemistry , oxygen , oxide , atomic physics , materials science , mass spectrometry , metallurgy , physics , organic chemistry , chromatography , thermodynamics
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