Open AccessRf sheaths and impurity generation by ICRF (ion cyclotron range of frequencies) antennas
Author(s) -
F. W. Perkins
Publication year - 1988
Language(s) - English
Resource type - Reports
DOI - 10.2172/6570191
Subject(s) - electric field , faraday cage , faraday cup , atomic physics , cyclotron , ion , physics , impurity , sputtering , electron , plasma , magnetic field , electron density , voltage , nuclear physics , thin film , ion beam , quantum mechanics
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