Open AccessPlasma sheath region near a boundary with positive ion backscattering
Author(s) -
J.N. Brooks
Publication year - 1981
Language(s) - English
Resource type - Reports
DOI - 10.2172/6559854
Subject(s) - plasma , debye sheath , atomic physics , ion , electron temperature , boundary (topology) , electron , sputtering , materials science , physics , computational physics , nuclear physics , mathematical analysis , mathematics , quantum mechanics , thin film , nanotechnology