Cold-Cathodes for Sensors and Vacuum Microelectronics

The aim of this laboratory-directed research and development project was to study amorphous carbon (a-C) thin films for eventual cold-cathode electron emitter applications. The development of robust, cold-cathode emitters are likely to have significant implications for modern technology and possibly launch a new industry: vacuum micro-electronics (VME). The potential impact of VME on Sandia`s National Security missions, such as defense against military threats and economic challenges, is profound. VME enables new microsensors and intrinsically radiation-hard electronics compatible with MOSFET and IMEM technologies. Furthermore, VME is expected to result in a breakthrough technology for the development of high-visibility, low-power flat-panel displays. This work covers four important research areas. First, the authors studied the nature of the C-C bonding structures within these a-C thin films. Second, they determined the changes in the film structures resulting from thermal annealing to simulate the effects of device processing on a-C properties. Third, they performed detailed electrical transport measurements as a function of annealing temperature to correlate changes in transport properties with structural changes and to propose a model for transport in these a-C materials with implications on the nature of electron emission. Finally, they used scanning atom probes to determine important aspects on the nature of emission in a-C