Open AccessFeasibility of low-cost, high-volume production of silane and pyrolysis of silane to semiconductor-grade silicon. Low Cost Silicon Solar Array Project. Quarterly progress report, January--March 1978
Author(s) -
W.C. Breneman,
E.G. Farrier,
H. Morihara
Publication year - 1978
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/6523257
Subject(s) - silane , silicon , silicon tetrachloride , trichlorosilane , materials science , fluidized bed , polycrystalline silicon , silanes , pyrolysis , waste management , chemical engineering , process engineering , nanotechnology , metallurgy , engineering , composite material , thin film transistor , layer (electronics)
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