Open AccessLow-Cost Solar Array Project. Experimental process system development unit for producing semiconductor-grade silicon using the silane-to-silicon process. Quarterly progress report, October-December 1980
Publication year - 1980
Language(s) - English
Resource type - Reports
DOI - 10.2172/6510745
Subject(s) - silane , silicon , fluidized bed , materials science , process (computing) , wafer , process engineering , waste management , engineering , nanotechnology , computer science , optoelectronics , composite material , operating system