Open AccessContact microscopy with a soft x-ray laser
Author(s) -
D. DiCicco,
Dongsu Kim,
R. J. Rosser,
C.H. Skinner,
S. Suckewer,
A. P. Gupta,
Joseph G. Hirschberg
Publication year - 1989
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/6501844
Subject(s) - laser , microscope , photoresist , materials science , optics , scanning electron microscope , electron microscope , microscopy , resolution (logic) , soft x rays , optical microscope , nanotechnology , physics , computer science , layer (electronics) , artificial intelligence
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