Sandia programs relevant to microelectronics fabrication
Author(s) -
S. T. Picraux,
F. L. Vook,
Brian D. Gregory
Publication year - 1987
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/6446238
Subject(s) - microelectronics , fabrication , engineering , national laboratory , engineering physics , semiconductor industry , library science , manufacturing engineering , engineering management , electrical engineering , computer science , medicine , alternative medicine , pathology
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