Open AccessFeasibility of low-cost, high-volume production of silane and pyrolysis of silane to semiconductor-grade silicon. Quarterly progress report, April--June 1978. Low cost silicon solar array project
Author(s) -
W.C. Breneman,
E.G. Farrier,
H. Morihara
Publication year - 1978
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/6439762
Subject(s) - silane , silicon , silicon tetrachloride , trichlorosilane , materials science , fluidized bed , polycrystalline silicon , waste management , process engineering , chemical engineering , nanotechnology , optoelectronics , engineering , composite material , thin film transistor , layer (electronics)
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom