Effect of various gas mixtures on plasma cleaned ceramics. Final report. [Electronic components]
Author(s) -
Mark D. Smith
Publication year - 1979
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/6375508
Subject(s) - plasma , ceramic , chemistry , analytical chemistry (journal) , materials science , environmental chemistry , organic chemistry , nuclear physics , physics
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