Open AccessInvestigation of the hydrogenation of SiCl/sub 4/. Final report, March 31, 1979-April 1, 1981
Author(s) -
J. Y.P. Mui,
D. Seyferth
Publication year - 1981
Language(s) - English
Resource type - Reports
DOI - 10.2172/6317606
Subject(s) - silicon tetrachloride , trichlorosilane , silicon , catalysis , metal , nickel , chemistry , metallurgy , impurity , chromium , materials science , inorganic chemistry , chemical engineering , organic chemistry , engineering