Open AccessMetallization of large silicon wafers. Quarterly technical report No. 3, April 1--June 30, 1978
Author(s) -
R. A. Pryor,
T. Sparks
Publication year - 1978
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/6291492
Subject(s) - wafer , palladium , silicon , immersion (mathematics) , materials science , nanotechnology , metallurgy , engineering physics , engineering , chemistry , mathematics , catalysis , pure mathematics , biochemistry
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