Open AccessProcess feasibility study in support of silicon material. Task I. Quarterly technical progress report (XII), June--August 1978
Author(s) -
C.S. Fang,
K.C. Hansen,
Carl L. Yaws
Publication year - 1978
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/6213754
Subject(s) - silicon carbide , silicon tetrachloride , thermal conductivity , silane , viscosity , materials science , silicon , vaporization , liquid gas , process engineering , mechanical engineering , chemistry , thermodynamics , composite material , metallurgy , engineering , organic chemistry , physics
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