Open AccessArray Automated Assembly Task, Low Cost Silicon Solar Array Project: Phase 2. Quarterly technical report No. 4 for July--September 1978
Author(s) -
Sang S. Rhee,
Gregory Jones,
Kimberly L. Allison
Publication year - 1978
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/6170184
Subject(s) - wafer , materials science , coating , etching (microfabrication) , solar cell , silicon nitride , automation , semiconductor device fabrication , dopant , optoelectronics , nanotechnology , silicon , engineering , layer (electronics) , mechanical engineering , doping
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