Open AccessIon mixing of semiconductor layered-structures
Author(s) -
S. S. Lau
Publication year - 1991
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/6169430
Subject(s) - mixing (physics) , ion , semiconductor , materials science , ion beam mixing , impurity , oak ridge national laboratory , chemical physics , dopant , chemistry , doping , optoelectronics , ion beam deposition , ion source , physics , nuclear physics , organic chemistry , quantum mechanics