Open AccessFeasibility of low-cost, high-volume production of silane and pyrolysis of silane to semiconductor-grade silicon. Low cost silicon solar array project. Quarterly progress report for July--September 1978
Author(s) -
W.C. Breneman,
E.G. Farrier,
H. Morihara
Publication year - 1978
Language(s) - English
Resource type - Reports
DOI - 10.2172/6035381
Subject(s) - silane , silicon , silicon tetrachloride , silanes , polycrystalline silicon , materials science , pyrolysis , process engineering , waste management , chemical engineering , nanotechnology , engineering , metallurgy , layer (electronics) , thin film transistor
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