Open AccessAssessment of the application of the sputtering process to beryllium for hardening optical coatings
Author(s) -
C.W. Chen,
C. Alford
Publication year - 1985
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/5987928
Subject(s) - beryllium , sputtering , materials science , microstructure , deposition (geology) , evaporation , metallurgy , hardening (computing) , sputter deposition , thin film , composite material , nanotechnology , chemistry , layer (electronics) , geology , paleontology , physics , organic chemistry , sediment , thermodynamics
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