Open AccessProcess feasibility study in support of silicon material Task I. Quarterly technical progress report (XIV), January-March 1979
Author(s) -
K.Y. Li,
K.C. Hansen,
Carl L. Yaws
Publication year - 1979
Language(s) - English
Resource type - Reports
DOI - 10.2172/5927907
Subject(s) - vaporization , viscosity , dichlorosilane , silicon , thermodynamics , chemical reaction engineering , process engineering , materials science , thermal conductivity , chemistry , mechanical engineering , nuclear engineering , engineering , metallurgy , composite material , organic chemistry , physics , catalysis