Open AccessDevelopment of damage resistant sputtered oxide optical coatings for use at 248 NM
Author(s) -
W.T. Pawlewicz,
Patrick Martin,
D.D. Hays,
I. B. Mann
Publication year - 1981
Language(s) - English
Resource type - Reports
DOI - 10.2172/5922065
Subject(s) - materials science , optical coating , oxide , sputtering , coating , laser , characterization (materials science) , optoelectronics , deposition (geology) , optics , nanotechnology , thin film , metallurgy , paleontology , physics , sediment , biology