Open AccessDeposition and properties of novel nitride superlattice coatings
Author(s) -
S A Barnett,
W D Sproul
Publication year - 1991
Language(s) - English
Resource type - Reports
DOI - 10.2172/5917826
Subject(s) - superlattice , tin , crystallite , materials science , nitride , deposition (geology) , thin film , crystal (programming language) , single crystal , metallurgy , crystallography , composite material , optoelectronics , nanotechnology , chemistry , layer (electronics) , paleontology , sediment , computer science , biology , programming language