Open AccessExcimer laser chemical problems
Author(s) -
R Tennant,
N Peterson
Publication year - 1982
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/5767433
Subject(s) - laser , excimer laser , halogen , chemical laser , chemical process , contamination , degradation (telecommunications) , materials science , chemical reaction , chemistry , environmental science , optics , computer science , organic chemistry , telecommunications , physics , ecology , alkyl , biology