Open AccessIon mixing of semiconductor layered-structures
Author(s) -
S. S. Lau,
J. W. Mayer,
B. D. Hall
Publication year - 1992
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/5765653
Subject(s) - mixing (physics) , ion , semiconductor , superlattice , materials science , ion beam mixing , semiconductor device , dopant , ion implantation , intrinsic semiconductor , optoelectronics , chemistry , doping , nanotechnology , ion beam , ion beam deposition , physics , organic chemistry , layer (electronics) , quantum mechanics