Open AccessThin films of silicon on low-cost substrates. Quarterly report No. 5, January 1-March 31, 1978
Author(s) -
Kalluri R. Sarma,
R.W. Gurtler,
A. Baghdadi,
M. Cota
Publication year - 1978
Language(s) - English
Resource type - Reports
DOI - 10.2172/5749786
Subject(s) - chlorosilane , silicon , silicon tetrachloride , deposition (geology) , substrate (aquarium) , materials science , beam (structure) , thermochemistry , chemical vapor deposition , hydrogen , analytical chemistry (journal) , chemical engineering , nanotechnology , chemistry , optoelectronics , optics , organic chemistry , paleontology , physics , engineering , sediment , biology , geology , oceanography