Open AccessStudy of elimination of vapor atom deposition. Final report
Author(s) -
W. J. Rae,
G Skinner,
W. Wurster
Publication year - 1982
Language(s) - English
Resource type - Reports
DOI - 10.2172/5718376
Subject(s) - beam (structure) , aperture (computer memory) , torr , atomic physics , vacuum chamber , atom (system on chip) , deposition (geology) , section (typography) , nuclear physics , chemistry , physics , optics , nuclear engineering , engineering , mechanical engineering , computer science , aerospace engineering , paleontology , sediment , biology , thermodynamics , embedded system , operating system