Open AccessExperimental thin film deposition and surface analysis techniques
Author(s) -
W. J. Collins,
B. Rambabu
Publication year - 1986
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/5705694
Subject(s) - deposition (geology) , thin film , materials science , surface (topology) , grain boundary , process (computing) , nanotechnology , engineering physics , computer science , metallurgy , geology , engineering , mathematics , microstructure , geometry , paleontology , sediment , operating system
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