Open AccessExperimental process system development unit for producing semiconductor-grade silicon using the silane-to-silicon process. Quarterly progress report, July-September 1979
Publication year - 1979
Language(s) - English
Resource type - Reports
DOI - 10.2172/5649285
Subject(s) - silicon , wafer , materials science , silane , epitaxy , semiconductor , rod , raw material , electrical resistivity and conductivity , optoelectronics , nanotechnology , electrical engineering , composite material , engineering , chemistry , medicine , alternative medicine , organic chemistry , layer (electronics) , pathology