Open AccessPhase 2 of the automated array assembly task of the low-cost silicon solar array project. Technical quarterly report No. 4, April 1-June 30, 1979
Author(s) -
M. G. Coleman,
R. A. Pryor,
T. Sparks
Publication year - 1979
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/5629155
Subject(s) - wafer , silicon , materials science , substrate (aquarium) , silicon nitride , etching (microfabrication) , optoelectronics , ion implantation , plasma , layer (electronics) , copper , ion , nanotechnology , metallurgy , chemistry , physics , geology , oceanography , quantum mechanics , organic chemistry
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