Open AccessPhase 2 of the automated array assembly task of the Low-Cost Silicon Solar Array Project. Technical quarterly report No. 5, July 1-September 30, 1979
Author(s) -
M. G. Coleman,
R. A. Pryor,
T. Sparks
Publication year - 1979
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/5579283
Subject(s) - etching (microfabrication) , materials science , silicon , silicon nitride , plasma , optoelectronics , plasma etching , nitride , nanotechnology , layer (electronics) , physics , quantum mechanics
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