Open AccessArray automated assembly. Phase 2. Quarterly report for period ending March 31, 1979
Author(s) -
W. E. Taylor,
N. Mardesich,
B. B. Edwards,
S. Bunyan,
Alberto Luis García García
Publication year - 1979
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/5559015
Subject(s) - wafer , fabrication , sequence (biology) , materials science , coating , wafer fabrication , equivalent series resistance , process (computing) , computer science , optoelectronics , nanotechnology , engineering , electrical engineering , chemistry , medicine , biochemistry , alternative medicine , pathology , voltage , operating system