X-ray microdiffraction studies of an integrated laser-modulator system
Author(s) -
W. Rodrigues,
Z. Cai,
Wenrong Yun,
H.R. Lee,
P. Ilinski,
E. Isaacs,
J. Grenko
Publication year - 1997
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/555519
Subject(s) - spatial light modulator , monochromatic color , optics , laser , superlattice , beam (structure) , materials science , flux (metallurgy) , zone plate , diffraction , physics , photon , resolution (logic) , optoelectronics , artificial intelligence , computer science , metallurgy
The authors report the use of a spatially resolved x-ray microdiffraction technique for the structural study of an integrated laser-modulator system. The monochromatic (11 keV) x-ray beam microfocused to less than 1 {micro}m in the vertical direction was obtained using a phase zone plate. The photon flux at the focal spot exceeded 3 {times} 10{sup 10} photons/s/0.01% bw/{micro}m{sup 2}. The intense flux density and high spatial resolution of the focused beam was used to study the structure of a laser-modulator system, which is a 1-{micro}m-wide and 1-mm-long multi-quantum well structure on an InP substrate. The superlattice d-spacing and the strain field in the direction normal to the diffracting planes were mapped as a function of position along the length of the device
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