Surface roughening, columnar growth and intrinsic stress formation in amorphous CuTi films
Author(s) -
U.V. Huelsen,
U. Geyer,
P. Thiyagarajan
Publication year - 1997
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/541867
Subject(s) - materials science , amorphous solid , scanning tunneling microscope , composite material , condensed matter physics , crystallography , nanotechnology , chemistry , physics
The growth of amorphous CuTi films, prepared by electron beam evaporation, is investigated by Scanning Tunneling Microscopy (STM), Small Angle Neutron Scattering (SANS) and in situ measurements of intrinsic mechanical stresses (ISM). In early growth stages the films develop compressive stresses and, with increasing film thickness, a crossover to tensile stresses. In the same thickness range the STM investigations show a change in the growth mode. The experiments suggest a transition from planar growth with statistical surface roughening to columnar growth
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