Open AccessEstablishment of the feasibility of a process capable of low cost, high volume production of silane (Phase I), and the pyrolysis of silane to semiconductor-grade silicon (Phase II). Low Cost Silicon Solar Array Project, Task I. Quarterly progress report, April--June 1977
Author(s) -
W.C. Breneman,
E.G. Farrier,
J.Y.P. Mui,
J. Rexer
Publication year - 1977
Language(s) - English
Resource type - Reports
DOI - 10.2172/5385536
Subject(s) - silane , trichlorosilane , materials science , silicon , chemical engineering , metallurgy , composite material , engineering
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