Thin films of gallium arsenide on low-cost substrates. Quarterly technical progress report No. 5 and topical report No. 1, October 2, 1977-December 31, 1977
Author(s) -
R. P. Ruth,
P.D. Dapkus,
Russell D. Dupuis,
R.E. Johnson,
H. M. Manasevit,
L. A. Moudy,
J.J. Yang,
R. D. Yingling
Publication year - 1978
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/5324270
Subject(s) - trimethylgallium , chemical vapor deposition , materials science , graphite , amorphous solid , arsine , thin film , substrate (aquarium) , crystallite , gallium arsenide , fabrication , mineralogy , chemical engineering , optoelectronics , analytical chemistry (journal) , metallurgy , nanotechnology , epitaxy , chemistry , metalorganic vapour phase epitaxy , catalysis , crystallography , organic chemistry , oceanography , alternative medicine , layer (electronics) , pathology , geology , phosphine , engineering , medicine
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