Open AccessSimple method for the calculation and use of CVD phase diagrams with applications to the Ti-B-Cl-H system, 1200 to 800/sup 0/K
Author(s) -
E. Randich,
Terrence M. Gerlach
Publication year - 1980
Language(s) - English
Resource type - Reports
DOI - 10.2172/5296040
Subject(s) - phase diagram , thermodynamics , yield (engineering) , simple (philosophy) , phase (matter) , chemical vapor deposition , materials science , phase equilibrium , gas phase , energy minimization , field (mathematics) , stability (learning theory) , chemistry , mathematics , physics , nanotechnology , computational chemistry , computer science , philosophy , organic chemistry , epistemology , pure mathematics , machine learning